الفهرس 
INTRODUCTION To MICROELECTRO MECHANICAL SYSTEMS (MEMS)Only 14 pages are availabe for public view
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Abstract
In chapter 1 I defined what is MEMS , advantages Of MEMS , Diverse products and markets of MEMS, Definitions and Classifications
and Applications of ME MS.
In chapter 2 If we view micromachining technology as a set of generic tools, then there is no reason to limit its use to one material. Indeed, micromachining has been demonstrated using silicon, glass, ceramics, polymers, as well as a variety of metals including titanium and tungsten. Silicon, however, remains the material of choice for micro electromechanical systems. The object of this chapter is to present the properties of silicon and several other materials, and MEMS fabrication methods
In chapter 3 I defined Wireless Systems. A Circuits Perspective
In chapter 4 RF MEMS.Enabled Circuit Elements and Models, and Novel RF MEMS.Enabled Circuits