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Abstract The rapid progress of CMOS technology pushes the dimension of devices in the nano scale range where ’quantwn effects start to become important. Reduced channel lengths change the transport from drift diffusion to ballistic where scattering is rare. DO MOSFET operating in the ballistic regime differs from the common behavior in different aspects. The reduced silicon thickness leads to energy quantization, structural and electrical confinement of carriers. Much work was done to model these effects and rigorous numerical simulations were obtained. As numerical simulation is time consuming and not suitable for circuit simulation, we proposed in this thesis a compact model where most of the effects resulting from the reduced dimensions are taken into consideration. The model uses a single expression for current for all regions of operation including linear and saturation, subthreshold and high gate bias. This ensures current continuity. The model is adjusted to be valid over a wide range of silicon and oxide thickness. The model also is suitable for long and short channel by use of tunable equation. A compact equation for direct tunneling gate current is also proposed. This equation takes into account the energy quantization and wave penetration at the oxide interface. The strength of the model presented here is demonstrated by comparison with numerical simulations. In fact, the analytic model gives strong agreement with numerical simulations for both drain and gate current with and without the use of high K material |