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Abstract
The problem of investigating the behavior of electromagnetic waves, especially in the optical region, when diffracting through sub wavelength dimensions has recently become a very active field of research due to the presence of this problem in different applications including photolithography and several other nanoscale applications. With the increasing complexity of the structures based on sub wavelength features, the need for fast and efficient numerical techniques to be used for the simulation of such structures has increased. Common techniques used for simulating structures with dimensions not in the order of the wavelength suffer from very large memory requirements and simulation time, making their use in sub wavelength problems not an optimum choice. In this thesis, a numerical technique is proposed for simulating the behavior of electromagnetic waves in such miniaturized dimensions. After a detailed explanation of the proposed technique, it is applied on different structures and the results are compared to published simulation and experimental results in order to verify the validity of the technique. The thesis is structured as follows: An introduction for the thesis includes a brief survey on the content of the thesis. In Chapter 1, different applications for the problem of diffracting electromagnetic waves through sub wavelength apertures are illustrated.