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Abstract
Piezoelectric actuators are used in a wide variety of precise Nano-positioning applications. Due to the effect of the nonlinear hysteresis, the positioning accuracy of the piezoelectric actuators is limited. Hence, developing a high precise control scheme is considered a great challenge. It is desirable to take the effect of nonlinear hysteresis into consideration for enhancing the tracking positioning accuracy of the piezoelectric actuators. In this thesis Robust μ-Synthesis and Hybrid Fuzzy Robust control schemes have been developed for a positioning system driven by piezoelectric actuator. Moreover the Hybrid Fuzzy Robust Controller gives better tracking error than the Robust μ- Synthesis controller. The effectiveness of the proposed control schemes has been validated.